发明申请
US20140203194A1 SYSTEM AND METHOD FOR GENERATING EXTREME ULTRA VIOLET LIGHT 审中-公开
用于产生超级紫外线灯的系统和方法

SYSTEM AND METHOD FOR GENERATING EXTREME ULTRA VIOLET LIGHT
摘要:
A system for generating extreme ultraviolet light, in which a target material inside a chamber is irradiated with a laser beam to be turned into plasma, includes a first laser apparatus configured to output a first laser beam, a second laser apparatus configured to output a pedestal and a second laser beam, and a controller connected to the first and second laser apparatuses and configured to cause the first laser beam to be outputted first, the pedestal to be outputted after the first laser beam, and the second laser beam having higher energy than the pedestal to be outputted after the pedestal.
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