发明申请
- 专利标题: SYSTEM AND METHOD FOR GENERATING EXTREME ULTRA VIOLET LIGHT
- 专利标题(中): 用于产生超级紫外线灯的系统和方法
-
申请号: US14241023申请日: 2012-09-05
-
公开(公告)号: US20140203194A1公开(公告)日: 2014-07-24
- 发明人: Hitoshi Nagano , Yasunori Wada , Tatsuya Yanagida , Osamu Wakabayashi
- 申请人: Hitoshi Nagano , Yasunori Wada , Tatsuya Yanagida , Osamu Wakabayashi
- 申请人地址: JP Oyama-shi, Tochigi
- 专利权人: GIGAPHOTON INC.
- 当前专利权人: GIGAPHOTON INC.
- 当前专利权人地址: JP Oyama-shi, Tochigi
- 优先权: JP2011-220911 20111005; JP2012-135472 20120615
- 国际申请: PCT/IB2012/001717 WO 20120905
- 主分类号: H05G2/00
- IPC分类号: H05G2/00
摘要:
A system for generating extreme ultraviolet light, in which a target material inside a chamber is irradiated with a laser beam to be turned into plasma, includes a first laser apparatus configured to output a first laser beam, a second laser apparatus configured to output a pedestal and a second laser beam, and a controller connected to the first and second laser apparatuses and configured to cause the first laser beam to be outputted first, the pedestal to be outputted after the first laser beam, and the second laser beam having higher energy than the pedestal to be outputted after the pedestal.
信息查询