发明申请
US20140203442A1 WIRING STRUCTURES FOR THREE-DIMENSIONAL SEMICONDUCTOR DEVICES 有权
三维半导体器件的接线结构

  • 专利标题: WIRING STRUCTURES FOR THREE-DIMENSIONAL SEMICONDUCTOR DEVICES
  • 专利标题(中): 三维半导体器件的接线结构
  • 申请号: US14157830
    申请日: 2014-01-17
  • 公开(公告)号: US20140203442A1
    公开(公告)日: 2014-07-24
  • 发明人: Jang-Gn YunHong-Soo KimHoo-Sung Cho
  • 申请人: Jang-Gn YunHong-Soo KimHoo-Sung Cho
  • 优先权: KR10-2013-0005726 20130118
  • 主分类号: G11C5/06
  • IPC分类号: G11C5/06
WIRING STRUCTURES FOR THREE-DIMENSIONAL SEMICONDUCTOR DEVICES
摘要:
Wiring structures of three-dimensional semiconductor devices and methods of forming the same are provided. The wiring structures may include an upper wordline and a lower wordline, each of which extends in a longitudinal direction. The upper wordline may include a recessed portion that extends for only a portion of the upper wordline in a transverse direction and the lower wordline may include a wiring area exposed by the recessed portion of the upper wordline. The wiring structures may also include an upper contact plug contacting the upper wordline and a lower contact plug contacting the wiring area. The upper and lower contact plugs may extend in a vertical direction.
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