发明申请
- 专利标题: METHOD FOR PROCESSING A FLEXIBLE SUBSTRATE
- 专利标题(中): 处理柔性基板的方法
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申请号: US14130895申请日: 2011-07-05
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公开(公告)号: US20140227455A1公开(公告)日: 2014-08-14
- 发明人: Gerd Hoffmann , Günter Klemm , Hans-Georg Lotz , Alexander Wolff
- 申请人: Gerd Hoffmann , Günter Klemm , Hans-Georg Lotz , Alexander Wolff
- 申请人地址: US CA Santa Clara
- 专利权人: APPLIED MATERIALS, INC.
- 当前专利权人: APPLIED MATERIALS, INC.
- 当前专利权人地址: US CA Santa Clara
- 国际申请: PCT/EP2011/061330 WO 20110705
- 主分类号: C08J3/28
- IPC分类号: C08J3/28
摘要:
A method of processing a flexible substrate includes providing a flexible substrate having a polymerized surface; emitting an electron beam; exposing the polymerized surface to the electron beam; modifying the polymerized surface by the exposure to the electron beam; and depositing a barrier layer on the modified surface.