发明申请
- 专利标题: FABRICATION OF POROUS SILICON ELECTROCHEMICAL CAPACITORS
- 专利标题(中): 多孔硅电化学电容器的制造
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申请号: US13997881申请日: 2011-12-27
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公开(公告)号: US20140233152A1公开(公告)日: 2014-08-21
- 发明人: Donald S. Gardner , Cary L. Pint , Charles W. Holzwarth , Wei Jin , Zhaohui Chen , Yang Liu , Eric C. Hannah , John L. Gustafson
- 申请人: Donald S. Gardner , Cary L. Pint , Charles W. Holzwarth , Wei Jin , Zhaohui Chen , Yang Liu , Eric C. Hannah , John L. Gustafson
- 国际申请: PCT/US2011/067434 WO 20111227
- 主分类号: H01G11/86
- IPC分类号: H01G11/86 ; H01G11/30 ; H01G4/008
摘要:
Methods of forming microelectronic structures are described. Embodiments of those methods may include forming an electrochemical capacitor device by forming pores in low-purity silicon materials. Various embodiments described herein enable the fabrication of high capacitive devices using low cost techniques.
公开/授权文献
- US10170244B2 Fabrication of porous silicon electrochemical capacitors 公开/授权日:2019-01-01
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