发明申请
- 专利标题: MOS Transistor Structure and Method
- 专利标题(中): MOS晶体管结构与方法
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申请号: US13776370申请日: 2013-02-25
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公开(公告)号: US20140239387A1公开(公告)日: 2014-08-28
- 发明人: Po-Yu Chen
- 申请人: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- 申请人地址: TW Hsin-Chu
- 专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- 当前专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- 当前专利权人地址: TW Hsin-Chu
- 主分类号: H01L21/82
- IPC分类号: H01L21/82 ; H01L27/088
摘要:
A MOS transistor structure comprises a substrate including a bulk semiconductor region, a first gate formed in a first trench, a first drain/source region, a second drain/source region, wherein the first drain/source region and the second drain/source region are formed on opposing sides of the first gate. The MOS transistor structure further comprises a second gate formed in a second trench, a third drain/source region, wherein the third drain/source region and the second drain/source region are formed on opposing sides of the second gate and a channel region formed in the bulk semiconductor region, wherein the channel region, the first drain/source region, the second drain/source region and the third drain source region share a same polarity.
公开/授权文献
- US09269709B2 MOS transistor structure and method 公开/授权日:2016-02-23
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