发明申请
- 专利标题: COMPOSITION FOR POLISHING COMPOUND SEMICONDUCTOR
- 专利标题(中): 用于抛光化合物半导体的组合物
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申请号: US14237262申请日: 2012-08-03
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公开(公告)号: US20140248776A1公开(公告)日: 2014-09-04
- 发明人: Hiroshi Asano , Hitoshi Morinaga , Kazusei Tamai
- 申请人: Hiroshi Asano , Hitoshi Morinaga , Kazusei Tamai
- 专利权人: FUJIMI INCORPORATED
- 当前专利权人: FUJIMI INCORPORATED
- 优先权: JP2011-174372 20110809
- 国际申请: PCT/JP2012/069856 WO 20120803
- 主分类号: C09G1/02
- IPC分类号: C09G1/02 ; H01L21/306
摘要:
Disclosed is a polishing composition that contains at least abrasive grains, an oxidizing agent having a redox potential equal to or greater than 1.8 V at a pH for application of polishing, and water. The abrasive grains are preferably composed of at least one substance selected from among silicon oxide, aluminum oxide, cerium oxide, zirconium oxide, titanium oxide, manganese oxide, silicon carbide, and silicon nitride. The oxidizing agent is preferably composed of at least one substance selected from among sodium persulfate, potassium persulfate, and ammonium persulfate. The polishing composition preferably has a pH equal to or less than 3.
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