发明申请
- 专利标题： PRESSURE TRANSDUCER SUBSTRATE WITH SELF ALIGNMENT FEATURE
- 专利标题（中）： 具有自对准功能的压力传感器基板
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申请号： US13788255申请日： 2013-03-07
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公开(公告)号： US20140251030A1公开(公告)日： 2014-09-11
- 发明人: Wico Hopman , George Van Der Donk , Maarten Van Noorden , Sean DiStefano
- 申请人： Wico Hopman , George Van Der Donk , Maarten Van Noorden , Sean DiStefano
- 主分类号： G01L1/14
- IPC分类号： G01L1/14
摘要：
In an embodiment, an apparatus includes a first substrate. The first substrate may have a first side for accommodating a first diaphragm. The first substrate may also have a second side. The second side may include a polygonal-shaped depression that is sized to accommodate a second diaphragm associated with a second substrate. The first substrate and first diaphragm may be included in a first assembly and the second substrate and second diaphragm may be included in a second assembly. The first assembly and the second assembly may be included in a stack where at least a portion of the second diaphragm is positioned to fit inside the polygonal-shaped depression in the stack.
公开/授权文献
- US09146164B2 Pressure transducer substrate with self alignment feature 公开/授权日：2015-09-29
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