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公开(公告)号：US09146164B2
公开(公告)日：2015-09-29
申请号：US13788255
申请日：2013-03-07
CPC分类号： G01L1/146 , G01L1/2243 , G01L7/08 , G01L7/082 , G01L9/0016 , G01L9/0042 , G01L9/0044 , G01L9/0047 , G01L9/0054 , G01L9/0072 , G01L9/0073 , G01L9/0075
摘要： In an embodiment, an apparatus includes a first substrate. The first substrate may have a first side for accommodating a first diaphragm. The first substrate may also have a second side. The second side may include a polygonal-shaped depression that is sized to accommodate a second diaphragm associated with a second substrate. The first substrate and first diaphragm may be included in a first assembly and the second substrate and second diaphragm may be included in a second assembly. The first assembly and the second assembly may be included in a stack where at least a portion of the second diaphragm is positioned to fit inside the polygonal-shaped depression in the stack.
摘要翻译： 在一个实施例中，装置包括第一基板。 第一基板可以具有用于容纳第一隔膜的第一侧。 第一衬底也可以具有第二面。 第二侧可以包括多边形凹陷，其尺寸适于容纳与第二基底相关联的第二隔膜。 第一基板和第一隔膜可以包括在第一组件中，并且第二基板和第二隔膜可以包括在第二组件中。 第一组件和第二组件可以包括在堆叠中，其中第二膜片的至少一部分被定位成装配在堆叠体的多边形凹陷部内。
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公开(公告)号：US20140251030A1
公开(公告)日：2014-09-11
申请号：US13788255
申请日：2013-03-07
IPC分类号： G01L1/14
CPC分类号： G01L1/146 , G01L1/2243 , G01L7/08 , G01L7/082 , G01L9/0016 , G01L9/0042 , G01L9/0044 , G01L9/0047 , G01L9/0054 , G01L9/0072 , G01L9/0073 , G01L9/0075
摘要： In an embodiment, an apparatus includes a first substrate. The first substrate may have a first side for accommodating a first diaphragm. The first substrate may also have a second side. The second side may include a polygonal-shaped depression that is sized to accommodate a second diaphragm associated with a second substrate. The first substrate and first diaphragm may be included in a first assembly and the second substrate and second diaphragm may be included in a second assembly. The first assembly and the second assembly may be included in a stack where at least a portion of the second diaphragm is positioned to fit inside the polygonal-shaped depression in the stack.
摘要翻译： 在一个实施例中，装置包括第一基板。 第一基板可以具有用于容纳第一隔膜的第一侧。 第一衬底也可以具有第二面。 第二侧可以包括多边形凹陷，其尺寸适于容纳与第二基底相关联的第二隔膜。 第一基板和第一隔膜可以包括在第一组件中，并且第二基板和第二隔膜可以包括在第二组件中。 第一组件和第二组件可以包括在堆叠中，其中第二膜片的至少一部分被定位成装配在堆叠体的多边形凹陷部内。
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公开(公告)号：US08499642B2
公开(公告)日：2013-08-06
申请号：US13097246
申请日：2011-04-29
申请人： Wico Hopman , Robert Zwijze , Paul Gennissen , Maarten van Noorden , George van der Donk , Jans Kruise
发明人： Wico Hopman , Robert Zwijze , Paul Gennissen , Maarten van Noorden , George van der Donk , Jans Kruise
CPC分类号： G01L9/0075 , G01L19/0038 , G01L19/0645
摘要： The invention relates to a fluid pressure sensing device comprising a pressure sensing transducer having a support structure and a diaphragm attached to said support structure, the diaphragm having a fluid facing side. A housing has a transducer receiving cavity defined by a bottom wall and a housing sidewall extending upwardly from the bottom wall. The bottom wall is formed with a fluid pressure receiving recess. A fluid pressure port is formed in the housing in communication with the recess. The diaphragm is positioned between the support structure and the fluid pressure receiving recess and a seal material around a support structure sidewall fixes the pressure sensing transducer in the housing and provides a hermetic seal.
摘要翻译： 本发明涉及一种流体压力感测装置，其包括具有支撑结构的压力感测传感器和附接到所述支撑结构的隔膜，所述隔膜具有面向流体的侧面。 壳体具有由底壁和从底壁向上延伸的壳体侧壁限定的换能器接收腔。 底壁形成有流体压力容纳凹部。 流体压力端口形成在与凹部连通的壳体中。 隔膜位于支撑结构和流体压力接收凹部之间，并且围绕支撑结构侧壁的密封材料将压力感测换能器固定在壳体中并提供气密密封。
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公开(公告)号：US20110296927A1
公开(公告)日：2011-12-08
申请号：US13097246
申请日：2011-04-29
申请人： Wico Hopman , Robert Zwijze , Paul Gennissen , Maarten van Noorden , George van der Donk , Jans Kruise
发明人： Wico Hopman , Robert Zwijze , Paul Gennissen , Maarten van Noorden , George van der Donk , Jans Kruise
IPC分类号： G01L9/00
CPC分类号： G01L9/0075 , G01L19/0038 , G01L19/0645
摘要： The invention relates to a fluid pressure sensing device comprising a pressure sensing transducer having a support structure and a diaphragm attached to said support structure, the diaphragm having a fluid facing side. A housing has a transducer receiving cavity defined by a bottom wall and a housing sidewall extending upwardly from the bottom wall. The bottom wall is formed with a fluid pressure receiving recess. A fluid pressure port is formed in the housing in communication with the recess. The diaphragm is positioned between the support structure and the fluid pressure receiving recess and a seal material around a support structure sidewall fixes the pressure sensing transducer in the housing and provides a hermetic seal.
摘要翻译： 本发明涉及一种流体压力感测装置，其包括具有支撑结构的压力感测传感器和附接到所述支撑结构的隔膜，所述隔膜具有面向流体的侧面。 壳体具有由底壁限定的换能器接收腔和从底壁向上延伸的壳体侧壁。 底壁形成有流体压力容纳凹部。 流体压力端口形成在与凹部连通的壳体中。 隔膜位于支撑结构和流体压力接收凹部之间，并且围绕支撑结构侧壁的密封材料将压力感测换能器固定在壳体中并提供气密密封。
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公开(公告)号：US08820170B2
公开(公告)日：2014-09-02
申请号：US13615783
申请日：2012-09-14
申请人： Rob Slakhorst , Gerard Klaasse , Erik Hop , Arnout van den Bos , Wico Hopman
发明人： Rob Slakhorst , Gerard Klaasse , Erik Hop , Arnout van den Bos , Wico Hopman
CPC分类号： G01L19/145 , G01L19/148
摘要： Techniques disclosed herein include systems and methods for pressure measurement of fluids including vehicular fluids. The pressure sensor includes a MEMS die for pressure measurement. The MEMS die is attached to a glass pedestal member. The pedestal member is mechanically held in place via a mounting frame that attachable to a pressure port of a fluid-containing enclosure. Techniques herein provide a strong connection of a MEMS die to a pressure sensor while decoupling thermal expansion stress from the MEMS die. With such decoupling techniques, pressure sensing reliability and accuracy can be improved. With thermal expansion stress decoupled from the MEMS die, sensor sealing materials can be selected for their robust chemical properties instead of structural properties. Such techniques provide an accurate, durable, and cost-effective pressure sensor.
摘要翻译： 本文公开的技术包括用于包括车辆流体的流体的压力测量的系统和方法。 压力传感器包括用于压力测量的MEMS模头。 MEMS模头附接到玻璃基座构件。 基座构件通过可附接到流体容纳外壳的压力端口的安装框架机械地保持就位。 这里的技术提供了MEMS管芯与压力传感器的强连接，同时使来自MEMS管芯的热膨胀应力解耦。 通过这种解耦技术，可以提高压力感测的可靠性和精度。 随着从MEMS模具解耦的热膨胀应力，传感器密封材料可以选择其坚固的化学性质而不是结构特性。 这种技术提供了一种精确，耐久和经济有效的压力传感器。
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公开(公告)号：US09027410B2
公开(公告)日：2015-05-12
申请号：US13615764
申请日：2012-09-14
申请人： Erik Hop , Gerard Klaasse , Rob Slakhorst , Wico Hopman , Arnout van den Bos
发明人： Erik Hop , Gerard Klaasse , Rob Slakhorst , Wico Hopman , Arnout van den Bos
CPC分类号： G01L19/04 , G01L19/147 , Y10T156/10
摘要： Techniques disclosed herein include systems and methods for pressure measurement of fluids including vehicular fluids. The pressure sensor includes a microelectromechanical system (MEMS) sensor for pressure measurement. The MEMS sensor is attached to a glass tube which is compressively sealed to a mounting frame that is attachable to a pressure port of a fluid-containing enclosure. Techniques disclosed herein provide an hermetic seal between the tube and the mounting frame and a rigid seal between the MEMS sensor to a pressure sensor while decoupling thermal expansion stress from the MEMS sensor. With such decoupling techniques, pressure sensing reliability and accuracy can be improved because thermal expansion stress is decoupled from the MEMS sensor. Such techniques provide an accurate, durable, and cost-effective pressure sensor.
摘要翻译： 本文公开的技术包括用于包括车辆流体的流体的压力测量的系统和方法。 压力传感器包括用于压力测量的微机电系统（MEMS）传感器。 MEMS传感器附接到玻璃管，该玻璃管被压缩密封到可附接到流体容纳封壳的压力端口的安装框架。 本文公开的技术提供了管和安装框架之间的气密密封，以及MEMS传感器与压力传感器之间的刚性密封，同时从MEMS传感器分离热膨胀应力。 通过这种解耦技术，可以提高压力感测的可靠性和精度，因为热膨胀应力与MEMS传感器解耦。 这种技术提供了一种精确，耐久和经济有效的压力传感器。
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公开(公告)号：US20140076057A1
公开(公告)日：2014-03-20
申请号：US13615783
申请日：2012-09-14
申请人： Rob Slakhorst , Gerard Klaasse , Erik Hop , Arnout van den Bos , Wico Hopman
发明人： Rob Slakhorst , Gerard Klaasse , Erik Hop , Arnout van den Bos , Wico Hopman
IPC分类号： G01L7/08
CPC分类号： G01L19/145 , G01L19/148
摘要： Techniques disclosed herein include systems and methods for pressure measurement of fluids including vehicular fluids. The pressure sensor includes a MEMS die for pressure measurement. The MEMS die is attached to a glass pedestal member. The pedestal member is mechanically held in place via a mounting frame that attachable to a pressure port of a fluid-containing enclosure. Techniques herein provide a strong connection of a MEMS die to a pressure sensor while decoupling thermal expansion stress from the MEMS die. With such decoupling techniques, pressure sensing reliability and accuracy can be improved. With thermal expansion stress decoupled from the MEMS die, sensor sealing materials can be selected for their robust chemical properties instead of structural properties. Such techniques provide an accurate, durable, and cost-effective pressure sensor.
摘要翻译： 本文公开的技术包括用于包括车辆流体的流体的压力测量的系统和方法。 压力传感器包括用于压力测量的MEMS模头。 MEMS模头附接到玻璃基座构件。 基座构件通过可附接到流体容纳外壳的压力端口的安装框架机械地保持就位。 这里的技术提供了MEMS管芯与压力传感器的强连接，同时使来自MEMS管芯的热膨胀应力解耦。 通过这种解耦技术，可以提高压力感测的可靠性和精度。 随着从MEMS模具解耦的热膨胀应力，传感器密封材料可以选择其坚固的化学性质而不是结构特性。 这种技术提供了一种精确，耐久和经济有效的压力传感器。
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公开(公告)号：US20140076059A1
公开(公告)日：2014-03-20
申请号：US13615764
申请日：2012-09-14
申请人： Erik Hop , Gerard Klaasse , Rob Slakhorst , Wico Hopman , Arnout van den Bos
发明人： Erik Hop , Gerard Klaasse , Rob Slakhorst , Wico Hopman , Arnout van den Bos
CPC分类号： G01L19/04 , G01L19/147 , Y10T156/10
摘要： Techniques disclosed herein include systems and methods for pressure measurement of fluids including vehicular fluids. The pressure sensor includes a microelectromechanical system (MEMS) sensor for pressure measurement. The MEMS sensor is attached to a glass tube which is compressively sealed to a mounting frame that is attachable to a pressure port of a fluid-containing enclosure. Techniques disclosed herein provide an hermetic seal between the tube and the mounting frame and a rigid seal between the MEMS sensor to a pressure sensor while decoupling thermal expansion stress from the MEMS sensor. With such decoupling techniques, pressure sensing reliability and accuracy can be improved because thermal expansion stress is decoupled from the MEMS sensor. Such techniques provide an accurate, durable, and cost-effective pressure sensor.
摘要翻译： 本文公开的技术包括用于包括车辆流体的流体的压力测量的系统和方法。 压力传感器包括用于压力测量的微机电系统（MEMS）传感器。 MEMS传感器附接到玻璃管，该玻璃管被压缩密封到可附接到流体容纳封壳的压力端口的安装框架。 本文公开的技术提供了管和安装框架之间的气密密封，以及MEMS传感器与压力传感器之间的刚性密封，同时从MEMS传感器解耦热膨胀应力。 通过这种解耦技术，可以提高压力感测的可靠性和精度，因为热膨胀应力与MEMS传感器解耦。 这种技术提供了一种精确，耐久和经济有效的压力传感器。
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