发明申请
US20140252464A1 METHOD OF FORMING STACKED TRENCH CONTACTS AND STRUCTURES FORMED THEREBY
审中-公开
形成堆叠的TRENCH联系人及其形成的结构的方法
- 专利标题： METHOD OF FORMING STACKED TRENCH CONTACTS AND STRUCTURES FORMED THEREBY
- 专利标题（中）： 形成堆叠的TRENCH联系人及其形成的结构的方法
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申请号： US14284808申请日： 2014-05-22
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公开(公告)号： US20140252464A1公开(公告)日： 2014-09-11
- 发明人: Bernhard Sell , Oleg Golonzka
- 申请人： Bernhard Sell , Oleg Golonzka
- 主分类号： H01L29/49
- IPC分类号： H01L29/49 ; H01L29/78 ; H01L29/66 ; H01L21/28
摘要：
Methods and associated structures of forming a microelectronic device are described. Those methods may include forming a structure comprising a first contact metal disposed on a source/drain contact of a substrate, and a second contact metal disposed on a top surface of the first contact metal, wherein the second contact metal is disposed within an IID disposed on a top surface of a metal gate disposed on the substrate.
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