发明申请
- 专利标题: SEMICONDUCTOR DEVICE AND METHOD OF PRODUCING THE SAME
- 专利标题(中): 半导体器件及其制造方法
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申请号: US14352142申请日: 2012-10-17
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公开(公告)号: US20140252465A1公开(公告)日: 2014-09-11
- 发明人: Hidefumi Takaya , Hideo Matsuki , Naohiro Suzuki , Tsuyoshi Ishikawa , Narumasa Soejima , Yukihiko Watanabe
- 申请人: Hidefumi Takaya , Hideo Matsuki , Naohiro Suzuki , Tsuyoshi Ishikawa , Narumasa Soejima , Yukihiko Watanabe
- 申请人地址: JP Kariya-shi, Aichi-ken JP Toyota-shi, Aichi-ken
- 专利权人: DENSO CORPORATION,TOYOTA JIDOSHA KABUSHIKI KAISHA
- 当前专利权人: DENSO CORPORATION,TOYOTA JIDOSHA KABUSHIKI KAISHA
- 当前专利权人地址: JP Kariya-shi, Aichi-ken JP Toyota-shi, Aichi-ken
- 优先权: JP2011-229183 20111018
- 国际申请: PCT/IB2012/002081 WO 20121017
- 主分类号: H01L29/423
- IPC分类号: H01L29/423 ; H01L29/66 ; H01L21/28 ; H01L29/78
摘要:
A semiconductor device has a semiconductor substrate including a body region, a drift region, a trench that extends from a surface of the semiconductor substrate into the drift region through the body region, and a source region located adjacent to the trench in a range exposed to the surface of the semiconductor substrate, the source region being isolated from the drift region by the body region. A specific layer is disposed on a bottom of the trench, and it has a characteristic of forming a depletion layer at a junction between the specific layer and the drift region. An insulating layer covers an upper surface of the specific layer and a sidewall of the trench. A conductive portion is formed on a part of the side wall of the trench. The conductive portion is joined to the specific layer, and reaches the surface of the semiconductor substrate.
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