Invention Application
US20140252509A1 MEMS DEVICE AND CORRESPONDING MICROMECHANICAL STRUCTURE WITH INTEGRATED COMPENSATION OF THERMO-MECHANICAL STRESS 有权
MEMS器件与相应的微机电结构与热机械应力的综合补偿

  • Patent Title: MEMS DEVICE AND CORRESPONDING MICROMECHANICAL STRUCTURE WITH INTEGRATED COMPENSATION OF THERMO-MECHANICAL STRESS
  • Patent Title (中): MEMS器件与相应的微机电结构与热机械应力的综合补偿
  • Application No.: US14189774
    Application Date: 2014-02-25
  • Publication No.: US20140252509A1
    Publication Date: 2014-09-11
  • Inventor: Angelo Antonio Merassi
  • Applicant: STMicroelectronics S.r.l.
  • Applicant Address: IT Agrate Brianza
  • Assignee: STMicroelectronics S.r.l.
  • Current Assignee: STMicroelectronics S.r.l.
  • Current Assignee Address: IT Agrate Brianza
  • Priority: ITTO2013A000174 20130305
  • Main IPC: B81B3/00
  • IPC: B81B3/00
MEMS DEVICE AND CORRESPONDING MICROMECHANICAL STRUCTURE WITH INTEGRATED COMPENSATION OF THERMO-MECHANICAL STRESS
Abstract:
A micromechanical structure of a MEMS device, integrated in a die of semiconductor material provided with a substrate and having at least a first axis of symmetry lying in a horizontal plane, has a stator structure, which is fixed with respect to the substrate, and a rotor structure, having a suspended mass, mobile with respect to the substrate and to the stator structure as a result of an external action, the stator structure having fixed sensing electrodes capacitively coupled to the rotor structure; a compensation structure is integrated in the die for compensation of thermo-mechanical strains. The compensation structure has stator compensation electrodes, which are fixed with respect to the substrate, are capacitively coupled to the rotor structure, and are arranged symmetrically to the fixed sensing electrodes with respect to the first axis of symmetry.
Information query
Patent Agency Ranking
0/0