发明申请
- 专利标题: DUAL THREE-DIMENSIONAL (3D) RESISTOR AND METHODS OF FORMING
- 专利标题(中): 双三维(3D)电阻和形成方法
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申请号: US13828936申请日: 2013-03-14
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公开(公告)号: US20140264752A1公开(公告)日: 2014-09-18
- 发明人: James P. Di Sarro , Robert J. Gauthier, JR. , Tom C. Lee , Junjun Li , Souvick Mitra , Christopher S. Putnam
- 申请人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 主分类号: H01L49/02
- IPC分类号: H01L49/02
摘要:
Various embodiments include dual three-dimensional (3D) resistor structures and methods of forming such structures. In some embodiments, a dual 3D resistor structure includes: a dielectric layer having a first set of trenches extending in a first direction through the dielectric layer; and a second set of trenches overlayed on the first set of trenches, the second set of trenches extending in a second direction through the dielectric layer, the second set of trenches and the first set of trenches forming at least one dual 3D trench; and a resistor material overlying the dielectric layer and at least partially filling the at least one dual 3D trench along the first direction and the second direction.
公开/授权文献
- US09064786B2 Dual three-dimensional (3D) resistor and methods of forming 公开/授权日:2015-06-23
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