发明申请
- 专利标题: Energy Filter for Charged Particle Beam Apparatus
- 专利标题(中): 带电粒子束能量滤波器
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申请号: US14276000申请日: 2014-05-13
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公开(公告)号: US20140284476A1公开(公告)日: 2014-09-25
- 发明人: Weiming Ren , Shuai Li , Zhongwei Chen
- 申请人: Hermes Microvision, Inc.
- 申请人地址: TW Hsinchu City
- 专利权人: Hermes Microvision, Inc.
- 当前专利权人: Hermes Microvision, Inc.
- 当前专利权人地址: TW Hsinchu City
- 主分类号: H01J37/05
- IPC分类号: H01J37/05 ; H01J37/12 ; H01J37/244 ; H01J37/26
摘要:
This invention provides a method for improving performance of a reflective type energy filter for a charged particle beam, which employs a beam-adjusting lens on an entrance side of a potential barrier of the energy filter to make the charged particle beam become a substantially parallel beam to be incident onto the potential barrier. The method makes the energy filter have both a fine energy-discrimination power over a large emission angle spread and a high uniformity of energy-discrimination powers over a large FOV. A LVSEM using this method in the energy filter can obviously improve image contrast. The invention also provides multiple energy-discrimination detection devices formed by using the advantages of the method.
公开/授权文献
- US09000395B2 Energy filter for charged particle beam apparatus 公开/授权日:2015-04-07