Methods, systems, and devices are disclosed for fabricating clean, oxidation-free nanoparticles of electrically conducting metals and alloys using spark erosion techniques. In one aspect, a method includes dispersing bulk pieces of an electrically conducting material in a dielectric fluid with mechanical vibrations within a container; generating an electric field using electrodes in the dielectric fluid using by an electric pulse, in which the electric field creates a plasma in a volume existing between the bulk pieces that locally heats the bulk pieces to form structures within the volume, the dielectric fluid quenching the structures to form nanoparticles, and filtering the nanoparticles through a screen including holes of a size allowing nanoparticles of the size or smaller to pass through the screen to a region in the container, in which the dielectric fluid inhibits oxidation of the surface of the nanoparticles.