Invention Application
US20140291546A1 Method and System for Controlling Convective Flow in a Light-Sustained Plasma
有权
用于控制轻维持等离子体中对流的方法和系统
- Patent Title: Method and System for Controlling Convective Flow in a Light-Sustained Plasma
- Patent Title (中): 用于控制轻维持等离子体中对流的方法和系统
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Application No.: US14224945Application Date: 2014-03-25
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Publication No.: US20140291546A1Publication Date: 2014-10-02
- Inventor: Ilya Bezel , Anatoly Shchemelinin , Matthew Derstine , Ken Gross , David W. Shortt , Wei Zhao , Anant Chimmalgi , Jincheng Wang
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Main IPC: H05H1/24
- IPC: H05H1/24 ; H01J65/00

Abstract:
A system for controlling convective flow in a light-sustained plasma includes an illumination source configured to generate illumination, a plasma cell including a bulb for containing a volume of gas, a collector element arranged to focus illumination from the illumination source into the volume of gas in order to generate a plasma within the volume of gas contained within the bulb. Further, the plasma cell is disposed within a concave region of the collector element, where the collector element includes an opening for propagating a portion of a plume of the plasma to a region external to the concave region of the collect element.
Public/Granted literature
- US09390902B2 Method and system for controlling convective flow in a light-sustained plasma Public/Granted day:2016-07-12
Information query
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