公开(公告)号：US11262591B2

公开(公告)日：2022-03-01

申请号：US16186320

申请日：2018-11-09

Applicant: KLA-Tencor Corporation

Inventor： Ilya Bezel ,  Matthew Derstine ,  Andrey Stepanov ,  Nikolay Sherbak

IPC: G02B27/09 ,  H05H1/24 ,  H05H1/02 ,  G02B5/00 ,  H05G2/00 ,  H01S3/00 ,  H01S3/16

Abstract: A system for generating pump illumination for laser sustained plasma (LSP) is disclosed. In embodiments, the system includes an illumination source and a beam shaper. The illumination source can be configured to output illumination having a first pupil power distribution. In embodiments, the beam shaper is configured to receive the illumination having the first pupil power distribution from the illumination source and is further configured to output pump illumination having a second pupil power distribution that is different from the first pupil power distribution.

公开(公告)号：US20200150445A1

公开(公告)日：2020-05-14

申请号：US16186320

申请日：2018-11-09

Applicant: KLA-Tencor Corporation

Inventor： Ilya Bezel ,  Matthew Derstine ,  Andrey Stepanov ,  Nikolay Sherbak

IPC: G02B27/09 ,  H05H1/02 ,  G02B5/00 ,  H01S3/00 ,  H05G2/00

Abstract: A system for generating pump illumination for laser sustained plasma (LSP) is disclosed. In embodiments, the system includes an illumination source and a beam shaper. The illumination source can be configured to output illumination having a first pupil power distribution. In embodiments, the beam shaper is configured to receive the illumination having the first pupil power distribution from the illumination source and is further configured to output pump illumination having a second pupil power distribution that is different from the first pupil power distribution.

公开(公告)号：US10381216B2

公开(公告)日：2019-08-13

申请号：US16231048

申请日：2018-12-21

Applicant: KLA-Tencor Corporation

Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Eugene Shifrin ,  Matthew Panzer

IPC: H01J65/04 ,  H05G2/00

Abstract: An optical system for generating broadband light via light-sustained plasma formation includes a chamber, an illumination source, a set of focusing optics, and a set of collection optics. The chamber is configured to contain a buffer material in a first phase and a plasma-forming material in a second phase. The illumination source generates continuous-wave pump illumination. The set of focusing optics focuses the continuous-wave pump illumination through the buffer material to an interface between the buffer material and the plasma-forming material in order to generate a plasma by excitation of at least the plasma-forming material. The set of collection optics receives broadband radiation emanated from the plasma.

公开(公告)号：US20190037676A1

公开(公告)日：2019-01-31

申请号：US16036660

申请日：2018-07-16

Applicant: KLA-Tencor Corporation

Inventor： Oleg Khodykin ,  Ilya Bezel

IPC: H05G2/00 ,  G21K5/04 ,  G21K1/06

Abstract: A system for generating broadband radiation is disclosed. The system includes a target material source configured to deliver one or more of a liquid or solid state target material to a plasma-forming region of a chamber. The system further includes a pump source configured to generate pump radiation to excite the target material in the plasma forming region of the chamber to generate broadband radiation. The system is further configured to transmit at least a portion of the broadband radiation generated in the plasma-forming region of the chamber out of the chamber through a windowless aperture.

公开(公告)号：US20180330937A1

公开(公告)日：2018-11-15

申请号：US16042887

申请日：2018-07-23

Applicant: KLA-Tencor Corporation

Inventor： Lauren Wilson ,  Anant Chimmalgi ,  Matthew Panzer ,  Ilya Bezel

IPC: H01J61/30 ,  H01J61/02 ,  H01J65/04 ,  H05G2/00

Abstract: A laser-sustained plasma light source includes a plasma lamp configured to contain a volume of gas and receive illumination from a pump laser in order to generate a plasma. The plasma lamp includes one or more transparent portions transparent to illumination from the pump laser and at least a portion of the broadband radiation emitted by the plasma. The one or more transparent portions are formed from a transparent material having elevated hydroxide content above 700 ppm.

公开(公告)号：US09899205B2

公开(公告)日：2018-02-20

申请号：US15223335

申请日：2016-07-29

Applicant: KLA-Tencor Corporation

Inventor： Ilya Bezel ,  Kenneth P. Gross ,  Lauren Wilson ,  Rahul Yadav ,  Joshua Wittenberg ,  Aizaz Bhuiyan ,  Anatoly Shchemelinin ,  Anant Chimmalgi ,  Richard Solarz

IPC: H01J61/12 ,  H01J61/02 ,  H01J61/36

CPC classification number: H01J61/12 ,  H01J61/025 ,  H01J61/16 ,  H01J61/20 ,  H01J61/36 ,  H01J65/04

Abstract: A system for forming a laser-sustained plasma includes a gas containment element, an illumination source configured to generate pump illumination, and a collector element configured to focus the pump illumination from the pumping source into the volume of the gas mixture in order to generate a plasma within the volume of the gas mixture that emits broadband radiation. The gas containment element may be configured to contain a volume of a gas mixture including a first gas component and a second gas component. The second gas component suppresses at least one of a portion of the broadband radiation associated with the first gas component or radiation by one or more excimers associated with the first gas component from a spectrum of radiation exiting the gas mixture.

公开(公告)号：US09735534B2

公开(公告)日：2017-08-15

申请号：US14571100

申请日：2014-12-15

Applicant: KLA-Tencor Corporation

Inventor： Richard W. Solarz ,  Ilya Bezel ,  Anatoly Shchemelinin

IPC: H01S3/094 ,  H01S3/22 ,  H01S3/225 ,  H01S3/0941 ,  H01S3/036

CPC classification number: H01S3/094 ,  H01S3/036 ,  H01S3/094042 ,  H01S3/094053 ,  H01S3/0941 ,  H01S3/2207 ,  H01S3/225

Abstract: Disclosed are methods and apparatus for generating a sub-200 nm continuous wave (cw) laser. A laser apparatus includes a chamber for receiving at least a rare gas or rare gas mixtures and a pump laser source for generating at least one cw pump laser focused in the chamber for generating at least one laser-sustained plasma in the chamber. The laser apparatus further includes a system for forming an optical cavity in which the at least one laser-sustained plasma serves as an excitation source for producing at least one cw laser having a wavelength that is below about 200 nm. In one aspect, the at least one laser-sustained plasma has a shape that substantially matches a shape of the optical cavity.

公开(公告)号：US09723703B2

公开(公告)日：2017-08-01

申请号：US14675322

申请日：2015-03-31

Applicant: KLA-Tencor Corporation

Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Richard Solarz ,  Sebaek Oh ,  Matthew Derstine

IPC: H05G2/00 ,  H01J61/02 ,  H01J61/30 ,  H01J65/04

CPC classification number: H05G2/003 ,  H01J61/025 ,  H01J61/302 ,  H01J65/042 ,  H05G2/001 ,  H05G2/008

Abstract: A laser-sustained plasma light source for transverse plasma pumping includes a pump source configured to generate pumping illumination, one or more illumination optical elements and a gas containment structure configured to contain a volume of gas. The one or more illumination optical elements are configured to sustain a plasma within the volume of gas of the gas containment structure by directing pump illumination along a pump path to one or more focal spots within the volume of gas. The one or more collection optical elements are configured to collect broadband radiation emitted by the plasma along a collection path. Further, the illumination optical elements are configured to define the pump path such that pump illumination impinges the plasma along a direction transverse to a direction of propagation of the emitted broadband light of the collection path such that the pump illumination is substantially decoupled from the emitted broadband radiation.

公开(公告)号：US20170150590A1

公开(公告)日：2017-05-25

申请号：US15280073

申请日：2016-09-29

Applicant: KLA-Tencor Corporation

Inventor： Anant Chimmalgi ,  Rudolf Brunner ,  Anatoly Shchemelinin ,  Ilya Bezel ,  Erik Kim ,  Rajeev Patil

IPC: H05G2/00 ,  G02B6/42 ,  H01J61/02 ,  H01J65/04 ,  H01J61/54

CPC classification number: H05G2/008 ,  G02B6/4204 ,  H01J61/025 ,  H01J61/54 ,  H01J65/04 ,  H01J65/042 ,  H05G2/003

Abstract: An illumination source for igniting and sustaining a plasma in a plasma lamp of a laser-sustained plasma (LSP) broadband source includes one or more ignition lasers configured to ignite the plasma within a gas contained within the plasma lamp. The illumination sources also includes one or more sustaining lasers configured to sustain the plasma. The illumination sources includes a delivery optical fiber one or more optical elements configured to selectively optically couple an output of the one or more ignition lasers and an output of the one or more sustaining lasers to the delivery optical fiber.

公开(公告)号：US20170094765A1

公开(公告)日：2017-03-30

申请号：US15274956

申请日：2016-09-23

Applicant: KLA-Tencor Corporation

Inventor： Anant Chimmalgi ,  Sebaek Oh ,  Joshua Wittenberg ,  Lauren Wilson ,  Rahul Yadav ,  Ilya Bezel ,  Michael Navone ,  Anatoly Shchemelinin

IPC: H05G2/00 ,  G01N23/04 ,  G02B6/02 ,  F21V8/00 ,  G02B27/14

CPC classification number: H05G2/008 ,  G01N23/04 ,  G02B6/0005 ,  G02B6/0006 ,  G02B6/0008 ,  G02B6/02042 ,  G02B6/028 ,  G02B6/4215 ,  G02B27/141

Abstract: An illumination pump source is disclosed. The illumination pump source includes a set of power sources configured to generate a set of laser beams, with at least some of the set of laser beams configured to include illumination having different wavelengths. The illumination pump source also includes an optical fiber. The illumination pump source also includes one or more optical elements, the one or more optical elements configured to couple the illumination from at least some of the laser beams to one or more regions of the optical fiber.