发明申请
- 专利标题: SELF-ASSEMBLABLE POLYMER AND METHOD FOR USE IN LITHOGRAPHY
- 专利标题(中): 自组装聚合物和方法用于光刻
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申请号: US14124213申请日: 2012-06-07
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公开(公告)号: US20140299575A1公开(公告)日: 2014-10-09
- 发明人: Aurelie Marie Andree Brizard , Wilhelmus Sebastianus Marcus Maria Ketelaars , Sander Frederik Wuister , Roelof Koole , Emiel Peeters , Christianus Martinus Van Heesch , Henri Marie Joseph Boots , Thanh Trung Nguyen
- 申请人: Aurelie Marie Andree Brizard , Wilhelmus Sebastianus Marcus Maria Ketelaars , Sander Frederik Wuister , Roelof Koole , Emiel Peeters , Christianus Martinus Van Heesch , Henri Marie Joseph Boots , Thanh Trung Nguyen
- 申请人地址: NL Veldhoven
- 专利权人: ASML Netherlands B.V.
- 当前专利权人: ASML Netherlands B.V.
- 当前专利权人地址: NL Veldhoven
- 国际申请: PCT/EP2012/060783 WO 20120607
- 主分类号: G03F7/00
- IPC分类号: G03F7/00 ; C08F299/04 ; C08F299/02
摘要:
A BCP having first block of first monomer and second block of second monomer, adapted to undergo a transition from disordered state to ordered state at a temperature less than TOD, further including a bridging moiety having a functional group to provide hydrogen bonding between bridging moieties of adjacent first and second BCP molecules when in the ordered state and at a temperature in excess of a glass transition temperature Tg for the BCP. Composition including BCP comprising first block of first monomer and second block of second monomer, and a crosslinking compound having first and second terminal groups joined by a central moiety and arranged to crosslink second blocks of adjacent first and second BCP molecules by providing non-covalent bonding between the terminal groups and a functional group of the second monomer of the second blocks when the BCP is in the ordered state.
公开/授权文献
- US09285676B2 Self-assemblable polymer and method for use in lithography 公开/授权日:2016-03-15
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