Invention Application
US20140299969A1 HIGHLY ETCH-RESISTANT POLYMER BLOCK FOR USE IN BLOCK COPOLYMERS FOR DIRECTED SELF-ASSEMBLY
有权
用于方向自组装的嵌入式共聚物中的高耐蚀性聚合物嵌段
- Patent Title: HIGHLY ETCH-RESISTANT POLYMER BLOCK FOR USE IN BLOCK COPOLYMERS FOR DIRECTED SELF-ASSEMBLY
- Patent Title (中): 用于方向自组装的嵌入式共聚物中的高耐蚀性聚合物嵌段
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Application No.: US14242551Application Date: 2014-04-01
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Publication No.: US20140299969A1Publication Date: 2014-10-09
- Inventor: Kui Xu , Mary Ann Hockey , Douglas Guerrero
- Applicant: Brewer Science Inc.
- Applicant Address: US MO Rolla
- Assignee: Brewer Science Inc.
- Current Assignee: Brewer Science Inc.
- Current Assignee Address: US MO Rolla
- Main IPC: H01L21/308
- IPC: H01L21/308

Abstract:
Compositions for directed self-assembly (DSA) patterning techniques are provided. Methods for directed self-assembly are also provided in which a DSA composition comprising a block copolymer is applied to a substrate and then self-assembled to form the desired pattern. The block copolymer includes at least two blocks of differing etch rates, so that one block (e.g., polymethylmethacrylate) is selectively removed during etching. Because the slower etching block (e.g., polystyrene) is modified with an additive to further slow the etch rate of that block, more of the slow etching block remains behind to fully transfer the pattern to underlying layers.
Public/Granted literature
- US09123541B2 Highly etch-resistant polymer block for use in block copolymers for directed self-assembly Public/Granted day:2015-09-01
Information query
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