发明申请
- 专利标题： ESTIMATION OF SIDEWALL SKEW ANGLES OF A STRUCTURE
- 专利标题（中）： 一个结构的边框角度的估计
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申请号： US13867720申请日： 2013-04-22
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公开(公告)号： US20140311243A1公开(公告)日： 2014-10-23
- 发明人: Aaron A. Geisberger , Kemiao Jia
- 申请人： Aaron A. Geisberger , Kemiao Jia
- 申请人地址： US TX Austin
- 专利权人： FREESCALE SEMICONDUCTOR, INC.
- 当前专利权人： FREESCALE SEMICONDUCTOR, INC.
- 当前专利权人地址： US TX Austin
- 主分类号： G01P15/08
- IPC分类号： G01P15/08
摘要：
An apparatus (36) includes a motion amplification structure (52), an actuator (54), and a sense electrode (50) in proximity to the structure (52). The actuator (54) induces an axial force (88) upon the structure (52), which causes a relatively large amount of in-plane motion (108) in one or more beams (58, 60) of the structure (52). When sidewalls (98) of the beams (58, 60) exhibit a skew angle (28), the in-plane motion (108) of the beams (58, 60) produces out-of-plane motion (110) of a paddle element (62) connected to the end of the beams (58, 60). The skew angle (28), which results from an etch process, defines a degree to which the sidewalls (98) of beams (58, 60) are offset or tilted from their design orientation. The out-of-plane motion (110) of element (62) is sensed at the electrode (50), and is utilized to determine an estimated skew angle (126).
公开/授权文献
- US09316665B2 Estimation of sidewall skew angles of a structure 公开/授权日：2016-04-19
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