发明申请
- 专利标题： FORMULATIONS FOR THE REMOVAL OF PARTICLES GENERATED BY CERIUM-CONTAINING SOLUTIONS
- 专利标题（中）： 通过含铈溶液除去颗粒物的制剂
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申请号： US13978825申请日： 2012-01-12
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公开(公告)号： US20140318584A1公开(公告)日： 2014-10-30
- 发明人: Emanuel I. Cooper , Jeffrey A. Barnes
- 申请人： Emanuel I. Cooper , Jeffrey A. Barnes
- 申请人地址： US CT Danbury
- 专利权人： ADVANCED TECHNOLOGY MATERIALS, INC.
- 当前专利权人： ADVANCED TECHNOLOGY MATERIALS, INC.
- 当前专利权人地址： US CT Danbury
- 国际申请： PCT/US12/21069 WO 20120112
- 主分类号： H01L21/02
- IPC分类号： H01L21/02
摘要：
Compositions and methods for removing lanthanoid-containing solids and/or species from the surface of a microelectronic device or microelectronic device fabrication hardware. Preferably, the lanthanoid-containing solids and/or species comprise cerium. The composition is preferably substantially devoid of fluoride ions.
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