发明申请
- 专利标题： WAFER TRANSPORT ROBOT
- 专利标题（中）： WAFER运输机器人
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申请号： US14365431申请日： 2011-12-15
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公开(公告)号： US20140321957A1公开(公告)日： 2014-10-30
- 发明人: Katsuhiro Yamazoe , Shinichi Imai , Kosuke Sakata , Yoshiki Nishijima , Hiroaki Tsukimoto , Kohsaku Saino
- 申请人： Katsuhiro Yamazoe , Shinichi Imai , Kosuke Sakata , Yoshiki Nishijima , Hiroaki Tsukimoto , Kohsaku Saino
- 申请人地址： JP Okayama
- 专利权人： TAZMO CO., LTD.
- 当前专利权人： TAZMO CO., LTD.
- 当前专利权人地址： JP Okayama
- 国际申请： PCT/JP2011/079030 WO 20111215
- 主分类号： H01L21/677
- IPC分类号： H01L21/677
摘要：
An object is to transmit an operation of a first parallel link to a second parallel link through a plurality of rotatably supported arms, to prevent the second parallel link from meandering or rolling so that a wafer can be transported smoothly.Arms (61 to 63) of a transmission arm unit (6) are provided for transmitting an operation of a first parallel link (4) to a second parallel link (5). An operation of the first parallel link (4) is transmitted to the second parallel link (5) so that an angle between an arm (53) and an arm (52) in the second parallel link(5) always coincides with an angle between an arm (41) and an arm (42) in the first parallel arm unit (4).
公开/授权文献
- US09508581B2 Wafer transport robot 公开/授权日：2016-11-29
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