发明申请
US20140339959A1 THIN FILM BULK ACOUSTIC RESONATOR AND METHOD FOR MANUFACTURING SAME
审中-公开
薄膜泡沫声谐振器及其制造方法
- 专利标题： THIN FILM BULK ACOUSTIC RESONATOR AND METHOD FOR MANUFACTURING SAME
- 专利标题（中）： 薄膜泡沫声谐振器及其制造方法
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申请号： US14353561申请日： 2012-06-07
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公开(公告)号： US20140339959A1公开(公告)日： 2014-11-20
- 发明人: Moon Chul Lee , In Sang Song , Duck Hwan Kim , Chul Soo Kim , Sang Uk Son , Jea Shik Shin , Ho Soo Park , Jing Cui
- 申请人： Moon Chul Lee , In Sang Song , Duck Hwan Kim , Chul Soo Kim , Sang Uk Son , Jea Shik Shin , Ho Soo Park , Jing Cui
- 申请人地址： KR Suwon-si
- 专利权人： SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人： SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人地址： KR Suwon-si
- 优先权： KR10-2011-0109254 20111025
- 国际申请： PCT/KR2012/004466 WO 20120607
- 主分类号： H03H9/17
- IPC分类号： H03H9/17 ; H01L41/297 ; H01L41/312 ; H01L41/332
摘要：
A thin film bulk acoustic resonator and a method of manufacturing the same is disclosed. The thin film bulk acoustic resonator includes an acoustic resonator including a first electrode, a second electrode, and a piezoelectric layer disposed between the first electrode and the second electrode; an air gap disposed below the acoustic resonator and above a substrate to reflect the acoustic wave; and an anchor disposed on each of both surfaces of the air gap and having the same thickness as the air gap.
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