发明申请
- 专利标题: TRANSISTOR USING SINGLE CRYSTAL SILICON NANOWIRE AND METHOD FOR MANUFACTURING SAME
- 专利标题(中): 使用单晶硅纳米晶的晶体管及其制造方法
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申请号: US14370212申请日: 2012-01-04
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公开(公告)号: US20140353591A1公开(公告)日: 2014-12-04
- 发明人: Sangsig Kim , Myeong-Won Lee , Youngin Jeon
- 申请人: Sangsig Kim , Myeong-Won Lee , Youngin Jeon
- 申请人地址: KR Seoul
- 专利权人: Korea University Research And Business Foundation
- 当前专利权人: Korea University Research And Business Foundation
- 当前专利权人地址: KR Seoul
- 优先权: KR10-2012-0000341 20120103
- 国际申请: PCT/KR2012/000079 WO 20120104
- 主分类号: H01L29/06
- IPC分类号: H01L29/06 ; H01L29/16 ; H01L21/306 ; H01L29/51 ; H01L21/02 ; H01L29/66 ; H01L29/10
摘要:
A transistor using a single crystal silicon nanowire and a method for fabricating the transistor is disclosed. The transistor using a single crystal silicon nanowire comprises a substrate and a single crystal silicon nanowire formed on the substrate. Here, the single crystal silicon nanowire comprises a source region and a drain region formed longitudinally with the single crystal silicon nanowire and separate from each other, and a channel region located between the source region and the drain region, wherein the perpendicular thickness of the channel region to the longitudinal direction is thinner than the thickness of the source region and the drain region.
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