发明申请
US20140353797A1 FUSE/RESISTOR UTILIZING INTERCONNECT AND VIAS AND METHOD OF MAKING
有权
使用互连和VIAS的熔断器/电阻器及其制造方法
- 专利标题: FUSE/RESISTOR UTILIZING INTERCONNECT AND VIAS AND METHOD OF MAKING
- 专利标题(中): 使用互连和VIAS的熔断器/电阻器及其制造方法
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申请号: US13907497申请日: 2013-05-31
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公开(公告)号: US20140353797A1公开(公告)日: 2014-12-04
- 发明人: Mehul D. SHROFF , Douglas M. REBER , Edward O. TRAVIS
- 申请人: Mehul D. SHROFF , Douglas M. REBER , Edward O. TRAVIS
- 主分类号: H01L23/525
- IPC分类号: H01L23/525 ; H01L49/02 ; H01L21/768 ; H01L23/522
摘要:
A semiconductor structure comprising a fuse/resistor structure over a functional layer having a substrate. The fuse/resistor structure includes a via, a first interconnect layer, and a second interconnect layer. The via is over the functional layer and has a first end and a second end vertically opposite the first end, wherein the first end is bounded by a first edge and a second edge opposite the first edge and the second end is bounded by a third edge and a fourth edge opposite the third edge. The first interconnect layer includes a first metal layer running horizontally and contacting the first end and completely extending from the first edge to the second edge. The second interconnect layer includes a second metal layer running horizontally and contacting the second end of the via and extending past the third edge but reaching less than half way to the fourth edge.
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