发明申请
- 专利标题: ACTIVE PIXEL SENSOR WITH NANOWIRE STRUCTURED PHOTODETECTORS
- 专利标题(中): 主动像素传感器与纳米结构的光电转换器
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申请号: US14293164申请日: 2014-06-02
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公开(公告)号: US20140361356A1公开(公告)日: 2014-12-11
- 发明人: Young-June Yu , Munib Wober
- 申请人: ZENA TECHNOLOGIES, INC.
- 申请人地址: US MA Cambridge
- 专利权人: ZENA TECHNOLOGIES, INC.
- 当前专利权人: ZENA TECHNOLOGIES, INC.
- 当前专利权人地址: US MA Cambridge
- 主分类号: H01L27/146
- IPC分类号: H01L27/146 ; H01L31/112 ; H01L31/0232 ; H01L31/0352
摘要:
An imaging device formed as an active pixel array combining a CMOS fabrication process and a nanowire fabrication process. The pixels in the array may include a single or multiple photogates surrounding the nanowire. The photogates control the potential profile in the nanowire, allowing accumulation of photo-generated charges in the nanowire and transfer of the charges for signal readout. Each pixel may include a readout circuit which may include a reset transistor, charge transfer switch transistor, source follower amplifier, and pixel select transistor. A nanowire is generally structured as a vertical rod on the bulk semiconductor substrate to receive light energy impinging onto the tip of the nanowire. The nanowire may be configured to function as either a photodetector or a waveguide configured to guild the light to the substrate. Light of different wavelengths can be detected using the imaging device.
公开/授权文献
- US09490283B2 Active pixel sensor with nanowire structured photodetectors 公开/授权日:2016-11-08
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