发明申请
US20150004438A1 METHOD FOR FORMING PATTERN, METHOD FOR PRODUCING MAGNETIC RECORDING MEDIUM USING THE SAME, MAGNETIC RECORDING MEDIUM, AND METHOD FOR PRODUCING STAMPER
有权
用于形成图案的方法，使用其制造磁记录介质的方法，磁记录介质以及用于生产印章的方法
- 专利标题： METHOD FOR FORMING PATTERN, METHOD FOR PRODUCING MAGNETIC RECORDING MEDIUM USING THE SAME, MAGNETIC RECORDING MEDIUM, AND METHOD FOR PRODUCING STAMPER
- 专利标题（中）： 用于形成图案的方法，使用其制造磁记录介质的方法，磁记录介质以及用于生产印章的方法
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申请号： US14060247申请日： 2013-10-22
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公开(公告)号： US20150004438A1公开(公告)日： 2015-01-01
- 发明人: Kazutaka Takizawa , Akira Watanabe , Kaori Kimura , Takeshi Iwasaki , Akihiko Takeo
- 申请人： Kabushiki Kaisha Toshiba
- 申请人地址： JP Tokyo
- 专利权人： Kabushiki Kaisha Toshiba
- 当前专利权人： Kabushiki Kaisha Toshiba
- 当前专利权人地址： JP Tokyo
- 优先权： JP2013-137302 20130628
- 主分类号： G11B5/851
- IPC分类号： G11B5/851 ; G11B5/74
摘要：
According to one embodiment, there is provided a method for forming a pattern including forming an island-like metal underlayer comprised of a first metal, a phase-separated release layer including a first metal, a second metal, and a metal oxide, a mask layer, and a resist layer on a processed layer in this order, forming a concave-convex pattern on the resist layer, transferring the pattern to the mask layer, the phase-separated release layer, and the processed layer in this order, dissolving the phase-separated release layer using a peeling liquid for dissolving the first metal and the second metal, and removing the mask layer from the processed layer to expose the concave-convex pattern.