Invention Application
- Patent Title: POWER INTEGRATED DEVICE HAVING SURFACE CORRUGATIONS
- Patent Title (中): 具有表面校正功能的集成器件
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Application No.: US14492243Application Date: 2014-09-22
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Publication No.: US20150008519A1Publication Date: 2015-01-08
- Inventor: Simone Dario Mariana , Andrea Paleari , Stephane Wen Yung Bach , Paolo Gattari
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Priority: ITTO2010A000521 20100617
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/10 ; H01L29/06 ; H01L29/40

Abstract:
According to a process for manufacturing an integrated power device, projections and depressions are formed in a semiconductor body that extend in a first direction and are arranged alternated in succession in a second direction, transversely to the first direction. Further provided are a first conduction region and a second conduction region. The first conduction region and the second conduction region define a current flow direction parallel to the first direction, along the projections and the depressions. To form the projections and the depressions, portions of the semiconductor body that extend in the first direction and correspond to the depressions, are selectively oxidized.
Information query
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