Invention Application
- Patent Title: ELASTIC WAVE DEVICE AND METHOD FOR MANUFACTURING SAME
- Patent Title (中): 弹性波形装置及其制造方法
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Application No.: US14493381Application Date: 2014-09-23
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Publication No.: US20150008789A1Publication Date: 2015-01-08
- Inventor: Takashi IWAMOTO
- Applicant: MURATA MANUFACTURING CO., LTD.
- Priority: JP2012-069584 20120326
- Main IPC: H01L41/053
- IPC: H01L41/053 ; H01L41/25 ; H03H3/08 ; H03H3/02 ; H01L41/08 ; H03H9/25

Abstract:
An elastic wave device includes elastic wave elements, each including a piezoelectric layer directly or indirectly supported by a supporting substrate and an electrode disposed in contact with the piezoelectric layer, and a highly heat-conductive member stacked on a surface of the supporting substrate, opposite to the surface supporting the piezoelectric layer, in which the thermal conductivity of the supporting substrate is higher than the thermal conductivity of the piezoelectric layer, the coefficient of linear expansion of the supporting substrate is lower than the coefficient of linear expansion of the piezoelectric layer, the highly heat-conductive member has a larger area than the surface of the supporting substrate supporting the piezoelectric layer, and the thermal conductivity of the highly heat-conductive member is higher than that of the piezoelectric layer.
Public/Granted literature
- US10096763B2 Elastic wave device and method for manufacturing same Public/Granted day:2018-10-09
Information query
IPC分类: