Invention Application
- Patent Title: Memory Arrays, Semiconductor Constructions, and Methods of Forming Semiconductor Constructions
- Patent Title (中): 存储阵列,半导体结构和形成半导体结构的方法
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Application No.: US14502978Application Date: 2014-09-30
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Publication No.: US20150014766A1Publication Date: 2015-01-15
- Inventor: Lars P. Heineck , Shyam Surthi , Jaydip Guha
- Applicant: Micron Technology, Inc.
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L29/66 ; H01L29/778

Abstract:
Some embodiments include memory arrays. The memory arrays may have digit lines under vertically-oriented transistors, with the digit lines interconnecting transistors along columns of the array. Each individual transistor may be directly over only a single digit line, with the single digit line being entirely composed of one or more metal-containing materials. The digit lines can be over a deck, and electrically insulative regions can be directly between the digit lines and the deck. Some embodiments include methods of forming memory arrays. A plurality of linear segments of silicon-containing material may be formed to extend upwardly from a base of the silicon-containing material. The base may be etched to form silicon-containing footings under the linear segments, and the footings may be converted into metal silicide. The linear segments may be patterned into a plurality of vertically-oriented transistor pedestals that extend upwardly from the metal silicide footings.
Public/Granted literature
- US09318493B2 Memory arrays, semiconductor constructions, and methods of forming semiconductor constructions Public/Granted day:2016-04-19
Information query
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