Invention Application
- Patent Title: HIGH VOLTAGE METAL-OXIDE-SEMICONDUCTOR TRANSISTOR DEVICE AND MANUFACTURING METHOD THEREOF
- Patent Title (中): 高电压金属氧化物半导体晶体管器件及其制造方法
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Application No.: US13938252Application Date: 2013-07-10
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Publication No.: US20150014768A1Publication Date: 2015-01-15
- Inventor: Wei-Lin Chen , Tseng-Hsun Liu , Kuan-Yu Chen , Chiu-Ling Lee , Chiu-Te Lee , Chih-Chung Wang
- Applicant: UNITED MICROELECTRONICS CORP.
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/66

Abstract:
A lateral double-diffused metal-oxide-semiconductor transistor device includes a substrate having at least a shallow trench isolation formed therein, an epitaxial layer encompassing the STI in the substrate, a gate, and a drain region and a source region formed in the substrate at respective two sides of the gate. The epitaxial layer, the source region and the drain region include a first conductivity type. The gate includes a first portion formed on the substrate and a second portion extending into the STI.
Public/Granted literature
- US08994103B2 High voltage metal-oxide-semiconductor transistor device and manufacturing method thereof Public/Granted day:2015-03-31
Information query
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