Invention Application
US20150014798A1 ASSEMBLY FOR A MEMS ENVIRONMENTAL SENSOR DEVICE HAVING IMPROVED RESISTANCE, AND CORRESPONDING MANUFACTURING PROCESS
审中-公开
具有改进电阻的MEMS环境传感器装置的组装以及相应的制造工艺
- Patent Title: ASSEMBLY FOR A MEMS ENVIRONMENTAL SENSOR DEVICE HAVING IMPROVED RESISTANCE, AND CORRESPONDING MANUFACTURING PROCESS
- Patent Title (中): 具有改进电阻的MEMS环境传感器装置的组装以及相应的制造工艺
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Application No.: US14327272Application Date: 2014-07-09
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Publication No.: US20150014798A1Publication Date: 2015-01-15
- Inventor: Dino Faralli , Benedetto Vigna , Laura Maria Castoldi
- Applicant: STMicroelectronics S.r.l. , STMicroelectronics International N.V.
- Priority: ITTO2013A000595 20130715
- Main IPC: B81B3/00
- IPC: B81B3/00 ; G01L1/00 ; G01H17/00 ; G01K1/00 ; B81C1/00 ; G01F1/00
Abstract:
Described herein is an assembly for a MEMS sensor device, which envisages: a first body made of semiconductor material, integrating a micromechanical detection structure at a first main face thereof; a cap element, set stacked on the first main face of the first body, above the micromechanical detection structure; and an adhesion structure set between the first body and the cap element, defining a gap in a position corresponding to the micromechanical detection structure. At least one first opening is defined through the adhesion structure in fluidic communication with the gap.
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