Invention Application
- Patent Title: METHOD FOR PERFORMING LASER CRYSTALLIZATION
- Patent Title (中): 执行激光结晶的方法
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Application No.: US14159386Application Date: 2014-01-20
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Publication No.: US20150017816A1Publication Date: 2015-01-15
- Inventor: Nang-Lyeom Oh , Je-Kil Ryu , Alexander Voronov , Gyoo-Wan Han
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR Yongin-City
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR Yongin-City
- Priority: KR10-2013-0081177 20130710
- Main IPC: H01L21/268
- IPC: H01L21/268 ; H01L21/263
Abstract:
A method for performing a laser crystallization is provided. The method includes generating a laser beam, refracting the laser beam to uniformize an intensity of the laser beam at a focal plane of the laser beam. The laser beam whose intensity is uniformized is applied into an object substrate mounted with a stage.
Public/Granted literature
- US09460930B2 Method for performing laser crystallization Public/Granted day:2016-10-04
Information query
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