公开(公告)号：US09460930B2

公开(公告)日：2016-10-04

申请号：US14159386

申请日：2014-01-20

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Nang-Lyeom Oh ,  Je-Kil Ryu ,  Alexander Voronov ,  Gyoo-Wan Han

IPC: H01L21/00 ,  H01L21/268 ,  B23K26/06 ,  H01L21/02

CPC classification number: H01L21/268 ,  B23K26/0648 ,  H01L21/02532 ,  H01L21/02675 ,  H01L21/02691

Abstract: A method for performing a laser crystallization is provided. The method includes generating a laser beam, refracting the laser beam to uniformize an intensity of the laser beam at a focal plane of the laser beam. The laser beam whose intensity is uniformized is applied into an object substrate mounted with a stage.

Abstract translation: 提供了一种执行激光结晶的方法。 该方法包括产生激光束，折射激光束以使激光束在激光束的焦平面处的强度均匀化。 将其强度均匀化的激光束施加到安装有台的对象基板中。

公开(公告)号：US20150017816A1

公开(公告)日：2015-01-15

申请号：US14159386

申请日：2014-01-20

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Nang-Lyeom Oh ,  Je-Kil Ryu ,  Alexander Voronov ,  Gyoo-Wan Han

IPC: H01L21/268 ,  H01L21/263

CPC classification number: H01L21/268 ,  B23K26/0648 ,  H01L21/02532 ,  H01L21/02675 ,  H01L21/02691

Abstract: A method for performing a laser crystallization is provided. The method includes generating a laser beam, refracting the laser beam to uniformize an intensity of the laser beam at a focal plane of the laser beam. The laser beam whose intensity is uniformized is applied into an object substrate mounted with a stage.

Abstract translation: 提供了一种执行激光结晶的方法。 该方法包括产生激光束，折射激光束以使激光束在激光束的焦平面处的强度均匀化。 将其强度均匀化的激光束施加到安装有台的对象基板中。

公开(公告)号：US09279978B2

公开(公告)日：2016-03-08

申请号：US14190661

申请日：2014-02-26

Applicant: Samsung Display Co., Ltd.

Inventor： Sung-Gon Kim ,  Je-Kil Ryu ,  Gyoo-Wan Han ,  Hae-Sook Lee ,  Tae-Yong Kim

IPC: G02B26/08 ,  G02B7/182 ,  H01S5/00

CPC classification number: G02B26/0816 ,  G02B7/1825 ,  H01S5/0071

Abstract: Apparatus for uniformizing light amount distribution by shaking line beams along a longitudinal axis direction is provided. The apparatus includes a mirror mount, a mirror, an actuator, and a deformation member. The mirror fixed to the mirror mount and includes a reflective surface. The actuator is disposed at a distance from the mirror mount and configured to repeat expansion and contraction along a first direction. The deformation member includes a plurality of blocks connected to each other by flexible joints and is coupled to the actuator and the mirror mount. The deformation member is configured to change a displacement in the first direction due to operation of the actuator to a displacement in a second direction that crosses the first direction, amplify the changed displacement, and transmit the amplified displacement to the mirror mount.

Abstract translation: 提供了通过沿纵向轴线方向抖动线束使光量分布均匀化的装置。 该装置包括反射镜安装件，反射镜，致动器和变形构件。 镜子固定在镜面支架上并包括一个反光表面。 致动器设置在距反射镜安装座一定距离处，并被配置成沿着第一方向重复膨胀和收缩。 变形构件包括通过柔性接头彼此连接并且连接到致动器和反射镜座的多个块。 变形构件被构造成将由于致动器的操作引起的在第一方向上的位移沿与第一方向相交的第二方向的位移改变，放大变化的位移，并且将放大的位移传递到反射镜座。

公开(公告)号：US10103180B2

公开(公告)日：2018-10-16

申请号：US13627094

申请日：2012-09-26

Applicant: Samsung Display Co., Ltd.

Inventor： Tae-Yong Kim ,  Joon-Hyung Kim ,  Je-Kil Ryu ,  Sung-Gon Kim ,  Pil-Kyu Kim

IPC: H01L27/12 ,  B23K26/082 ,  H01L51/56 ,  H01L27/32 ,  B23K101/40

Abstract: A crystallization apparatus for crystallizing a semiconductor layer formed on a substrate. The crystallization apparatus includes a laser generator, which generates a laser beam, an optical device for changing a path of the laser beam emitted from the laser generating device, and a stage on which the substrate is arranged, wherein the optical device changes the path of the laser beam by rotating with respect to a constant axis, and the stage is moved so that the laser beam having the changed path is irradiated to a constant region on the semiconductor layer.

公开(公告)号：US20130137204A1

公开(公告)日：2013-05-30

申请号：US13627094

申请日：2012-09-26

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Tae-Yong Kim ,  Joon-Hyung Kim ,  Je-Kil Ryu ,  Sung-Gon Kim ,  Pil-Kyu Kim

IPC: H01L21/268 ,  B23K26/00 ,  H01L51/56

CPC classification number: H01L27/1285 ,  B23K26/082 ,  B23K2101/40 ,  H01L27/3262 ,  H01L51/56

Abstract: A crystallization apparatus for crystallizing a semiconductor layer formed on a substrate. The crystallization apparatus includes a laser generator, which generates a laser beam, an optical device for changing a path of the laser beam emitted from the laser generating device, and a stage on which the substrate is arranged, wherein the optical device changes the path of the laser beam by rotating with respect to a constant axis, and the stage is moved so that the laser beam having the changed path is irradiated to a constant region on the semiconductor layer.

Abstract translation: 一种用于使形成在基板上的半导体层结晶的结晶装置。 结晶装置包括产生激光束的激光发生器，用于改变从激光产生装置发射的激光束的路径的光学装置和布置基板的台，其中光学装置改变 所述激光束相对于恒定轴旋转，并且所述载物台移动，使得具有改变路径的激光束照射到所述半导体层上的恒定区域。