发明申请
- 专利标题： CHARGED PARTICLE BEAM DRAWING APPARATUS AND DRAWING CHAMBER
- 专利标题（中）： 充电颗粒光束绘图设备和绘图室
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申请号： US14326997申请日： 2014-07-09
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公开(公告)号： US20150021495A1公开(公告)日： 2015-01-22
- 发明人: Hiroyasu SAITO , Yoshinori NAKAGAWA , Seiichi NAKAZAWA
- 申请人： NuFlare Technology, Inc
- 申请人地址： JP Yokohama
- 专利权人： NuFlare Technology, Inc
- 当前专利权人： NuFlare Technology, Inc
- 当前专利权人地址： JP Yokohama
- 优先权： JP2013-148593 20130717; JP2014-128883 20140624
- 主分类号： H01J37/20
- IPC分类号： H01J37/20 ; H01J37/317
摘要：
A charged particle beam drawing apparatus includes: a stage configured to support a specimen as a drawing target; and an airtight drawing chamber formed into a box shape provided with a side wall and a bottom plate, and configured to house the stage. The bottom plate includes: multiple support portions connected to the side wall and configured to support the stage; and a curved portion connected to the support portions and having a convex shape curved outward.
公开/授权文献
- US09196458B2 Charged particle beam drawing apparatus and drawing chamber 公开/授权日：2015-11-24
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