公开(公告)号：US20150021495A1

公开(公告)日：2015-01-22

申请号：US14326997

申请日：2014-07-09

申请人： NuFlare Technology, Inc

发明人： Hiroyasu SAITO ,  Yoshinori NAKAGAWA ,  Seiichi NAKAZAWA

IPC分类号： H01J37/20 ,  H01J37/317

CPC分类号： H01J37/3174 ,  H01J37/16 ,  H01J2237/20

摘要： A charged particle beam drawing apparatus includes: a stage configured to support a specimen as a drawing target; and an airtight drawing chamber formed into a box shape provided with a side wall and a bottom plate, and configured to house the stage. The bottom plate includes: multiple support portions connected to the side wall and configured to support the stage; and a curved portion connected to the support portions and having a convex shape curved outward.

摘要翻译： 带电粒子束描绘装置包括：被配置为支撑作为绘图目标的样本的平台; 以及形成为具有侧壁和底板的箱形的气密拉拔室，并且构造成容纳所述台。 底板包括：多个支撑部分，其连接到侧壁并且被配置为支撑台架; 以及与支撑部连接并具有向外弯曲的凸形的弯曲部。