发明申请
- 专利标题: METHOD FOR FABRICATING PHOTOVOLTAIC CELLS WITH PLATED CONTACTS
- 专利标题(中): 用电镀接触制造光伏电池的方法
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申请号: US14485477申请日: 2014-09-12
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公开(公告)号: US20150024541A1公开(公告)日: 2015-01-22
- 发明人: Périne Jaffrennou , Angel Uruena De Castro
- 申请人: IMEC VZW , Total Marketing Services , Katholieke Universiteit Leuven, KU LEUVEN R&D
- 主分类号: H01L31/0232
- IPC分类号: H01L31/0232 ; H01L31/18
摘要:
The disclosed technology relates generally to photovoltaic cells, and more particularly to photovoltaic cells with plated metal contacts. In one aspect, a method of fabricating a photovoltaic cell with a metal contact pattern on a surface of a semiconductor substrate includes locally smoothening portions of the surface of the semiconductor substrate by using a first laser, at predetermined locations. The method additionally includes doping the surface of the semiconductor substrate to form an emitter region. The method additionally includes forming a dielectric layer on the surface of the semiconductor substrate, and subsequently forming openings through the dielectric layer by using a second laser, thereby locally exposing the underlying surface of the semiconductor substrate at the predetermined locations. The method further includes forming metal contacts at exposed regions of the surface of the semiconductor substrate by plating.
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