Invention Application
- Patent Title: DEPOSITION OF THICK MAGNETIZABLE FILMS FOR MAGNETIC DEVICES
- Patent Title (中): 用于磁性器件的厚度可压缩膜的沉积
-
Application No.: US14324937Application Date: 2014-07-07
-
Publication No.: US20150034476A1Publication Date: 2015-02-05
- Inventor: Frank M. Cerio , Robert Gabriel Hieronymi
- Applicant: VEECO INSTRUMENTS, INC.
- Main IPC: H01J37/34
- IPC: H01J37/34 ; C23C14/34 ; C23C14/35

Abstract:
A PVD chamber for growing a magnetic film of NiFe alloy at a growth rate of greater than 200 nm/minute produces a film exhibiting magnetic skew of less than plus or minus 2 degrees, magnetic dispersion of less than plus or minus 2 degrees, DR/R of greater than 2 percent and film stress of less than 50 MPa. NiFe alloy is sputtered at a distance of 2 to 4 inches, DC power of 50 Watts to 9 kiloWats and pressure of 3 to 8 milliTorr. The chamber uses a unique field shaping magnetron having magnets arranged in outer and inner rings extending about a periphery of the magnetron except in two radially opposed regions in which the inner and outer rings diverge substantially toward a central axis of the magnetron.
Public/Granted literature
- US2248963A Container for confections Public/Granted day:1941-07-15
Information query