发明申请
US20150037514A1 Method And A Device For Depositing A Film Of Material Or Otherwise Processing Or Inspecting, A Substrate As It Passes Through A Vacuum Environment Guided By A Plurality Of Opposing And Balanced Air Bearing Lands And Sealed By Differentially Pumped Grooves And Sealing Lands In A Non-Contact Manner
审中-公开
方法和一种用于沉积材料膜或其他加工或检查的装置，一种基板通过多个反向和平衡的空气轴承地区通过真空环境，并通过差分泵浦和密封在非接触中密封 方式
- 专利标题： Method And A Device For Depositing A Film Of Material Or Otherwise Processing Or Inspecting, A Substrate As It Passes Through A Vacuum Environment Guided By A Plurality Of Opposing And Balanced Air Bearing Lands And Sealed By Differentially Pumped Grooves And Sealing Lands In A Non-Contact Manner
- 专利标题（中）： 方法和一种用于沉积材料膜或其他加工或检查的装置，一种基板通过多个反向和平衡的空气轴承地区通过真空环境，并通过差分泵浦和密封在非接触中密封 方式
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申请号： US14451116申请日： 2014-08-04
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公开(公告)号： US20150037514A1公开(公告)日： 2015-02-05
- 发明人: Andrew J. Devitt
- 申请人： NEW WAY MACHINE COMPONENTS, INC.
- 申请人地址： US PA Aston
- 专利权人： NEW WAY MACHINE COMPONENTS, INC.
- 当前专利权人： NEW WAY MACHINE COMPONENTS, INC.
- 当前专利权人地址： US PA Aston
- 主分类号： C23C16/458
- IPC分类号： C23C16/458 ; C23C16/50 ; H01L21/677 ; B05C13/00
摘要：
A method and apparatus for coating and baking and deposition of surfaces on glass substrate or flexible substrate, such as films and thin glass sheets or other similar work pieces as it transitions thru and between small gaps of aero-static or hydro-static porous media bearings and differentially pumped vacuum grooves, in a non-contact manner, in order to process within a vacuum environment. The process is also intended to incorporate simultaneous and immediately sequential ordering of various processes.
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