发明申请
- 专利标题： SOLUTION-ASSISTED CARBON NANOTUBE PLACEMENT WITH GRAPHENE ELECTRODES
- 专利标题（中）： 溶液辅助碳纳米管放置与石墨电极
-
申请号： US14496048申请日： 2014-09-25
-
公开(公告)号： US20150048312A1公开(公告)日： 2015-02-19
- 发明人: Phaedon Avouris , Christos Dimitrakopoulos , Damon B. Farmer , Mathias B. Steiner , Michael Engel , Ralph Krupke , Yu-Ming Lin
- 申请人： International Business Machines Corporation , Taiwan Bluestone Technology Ltd. , Karlsruhe Institute of Technology
- 主分类号： H01L29/06
- IPC分类号： H01L29/06 ; H01L29/45 ; H01L29/16
摘要：
A semiconductor device includes a substrate having at least one electrically insulating portion. A first graphene electrode is formed on a surface of the substrate such that the electrically insulating portion is interposed between a bulk portion of the substrate and the first graphene electrode. A second graphene electrode formed on the surface of the substrate. The electrically insulating portion of the substrate is interposed between the bulk portion of the substrate and the second graphene electrode. The second graphene electrode is disposed opposite the first graphene electrode to define an exposed substrate area therebetween.
公开/授权文献
信息查询
IPC分类:
