Invention Application
- Patent Title: Gas Laser Resonator
- Patent Title (中): 气体激光谐振器
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Application No.: US14470148Application Date: 2014-08-27
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Publication No.: US20150063397A1Publication Date: 2015-03-05
- Inventor: Hideho YAMAMURA , Goichi OHMAE , Nobuyoshi OHTANI
- Applicant: Via Mechanics, Ltd.
- Priority: JP2013-178087 20130829; JP2014-138370 20140704
- Main IPC: H01S3/032
- IPC: H01S3/032 ; H01S3/07

Abstract:
The present invention aims to prevent, in a gas laser resonator, the deterioration in quality of discharge by reduction of the change of the pressure in a discharge chamber and the inflow of impurity gases, such as air, into the discharge chamber.A bracket 6 is attached to one end of a tube 1 interposing a gasket 13 only for sealing an opening of the discharge chamber 2 only and a gasket 14 for sealing both openings of the discharge chamber 2 and a buffer chamber 12. Also, a glass plate 8 and further a bracket 9 are attached to the other end of the tube 1 interposing a gasket 15 only for sealing the opening of the discharge chamber 2 and a gasket 16 for sealing both openings of the discharge chamber 2 and the buffer chamber 12. The pressure in the buffer chamber 12 is set lower than that of the discharge chamber 2 or set higher than the atmospheric pressure to decrease the inflow of the impurity gases to the discharge chamber 2.
Public/Granted literature
- US09008143B2 Gas laser resonator Public/Granted day:2015-04-14
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