Invention Application
- Patent Title: Block-to-Block Reticle Inspection
- Patent Title (中): 块到块标线检查
-
Application No.: US14466688Application Date: 2014-08-22
-
Publication No.: US20150078650A1Publication Date: 2015-03-19
- Inventor: Abdurrahman Sezginer , Patrick LoPresti , Joe Blecher , Rui-fang Shi , Yalin Xiong , John Fielden
- Applicant: KLA-Tencor Corporation
- Main IPC: G01N21/88
- IPC: G01N21/88 ; G06T7/00 ; G01N21/958

Abstract:
Block-to-block reticle inspection includes acquiring a swath image of a portion of a reticle with a reticle inspection sub-system, identifying a first occurrence of a block in the swatch image and at least a second occurrence of the block in the swath image substantially similar to the first occurrence of the block and determining at least one of a location, one or more geometrical characteristics of the block and a spatial offset between the first occurrence of the block and the at least a second occurrence of the block.
Public/Granted literature
- US09766185B2 Block-to-block reticle inspection Public/Granted day:2017-09-19
Information query