Invention Application
US20150079722A1 AVALANCHE PHOTODIODE WITH A GUARD RING STRUCTURE AND METHOD THEREOF 审中-公开
具有保护环结构的AVALANCHE光电及其方法

AVALANCHE PHOTODIODE WITH A GUARD RING STRUCTURE AND METHOD THEREOF
Abstract:
Disclosed are an avalanche photodiode with a guard ring structure that relieves edge breakdown by an external voltage which is applied through a metal pad which is attached to the guard ring and a manufacturing method thereof. An avalanche photodiode with a guard ring structure includes a plurality of semiconductor layers laminated on a substrate; an active region partially formed above the semiconductor layers; a guard ring which is formed above the semiconductor layers and disposed so as to be spaced apart from the active region and have a ring shape that encloses the active region; and a connecting unit formed on the semiconductor layers to be electrically connected to the guard ring so as to apply an external voltage to the guard ring region. Therefore, the external voltage is applied to the guard ring of the avalanche diode through the connecting unit to relieve the edge breakdown.
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