发明申请
- 专利标题： System and Process for Calibrating Pyrometers in Thermal Processing Chambers
- 专利标题（中）： 热处理室校准高温计的系统和工艺
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申请号： US14567631申请日： 2014-12-11
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公开(公告)号： US20150092813A1公开(公告)日： 2015-04-02
- 发明人: Paul Janis Timans
- 申请人： Mattson Technology, Inc.
- 主分类号： G01J5/08
- IPC分类号： G01J5/08
摘要：
A method and system for calibrating temperature measurement devices, such as pyrometers, in thermal processing chambers are disclosed. According to the present invention, the system includes a calibrating light source that emits light energy onto a substrate contained in the thermal processing chamber. A light detector then detects the amount of light that is being transmitted through the substrate. The amount of detected light energy is then used to calibrate a temperature measurement device that is used in the system.
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