Invention Application
US20150093014A1 SYSTEM, A METHOD AND A COMPUTER PROGRAM PRODUCT FOR CAD-BASED REGISTRATION
有权
系统，基于CAD的注册的方法和计算机程序产品
- Patent Title: SYSTEM, A METHOD AND A COMPUTER PROGRAM PRODUCT FOR CAD-BASED REGISTRATION
- Patent Title (中): 系统，基于CAD的注册的方法和计算机程序产品
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Application No.: US14478859Application Date: 2014-09-05
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Publication No.: US20150093014A1Publication Date: 2015-04-02
- Inventor: Zvi Goren , Nir Ben-David Dodzin
- Applicant: Applied Materials Israel, Ltd.
- Main IPC: G06T7/00
- IPC: G06T7/00 ; G01B11/14 ; G01N21/95
Abstract:
A system for location based wafer analysis, the system comprising: (i) a first input interface; (ii) a second input interface; (iii) a correlator; and (iv) a processor, configured to generate inspection results for the inspected wafer, with the help of at least one frame run-time displacement.
Public/Granted literature
- US09355443B2 System, a method and a computer program product for CAD-based registration Public/Granted day:2016-05-31
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