Invention Application
US20150093508A1 COMPOSITION FOR PATTERN FORMATION AND PATTERN-FORMING METHOD 审中-公开
用于图案形成和图案形成方法的组合物

COMPOSITION FOR PATTERN FORMATION AND PATTERN-FORMING METHOD
Abstract:
A composition for pattern formation includes a block copolymer that includes a block represented by formula (I) and a block represented by formula (II). R1 and R3 each independently represent a hydrogen atom, a methyl group, a fluorine atom or a trifluoromethyl group. R2 represents a monovalent organic group. R4 represents a hydrocarbon group having a valency of (1+b) and having 1 to 5 carbon atoms. R5 represents a monovalent group having a hetero atom. m and n are each independently an integer of 10 to 5,000. a is an integer of 0 to 5. b is an integer of 1 to 3.
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