Invention Application
- Patent Title: MICROELECTRONIC DEVICES WITH THROUGH-SUBSTRATE INTERCONNECTS AND ASSOCIATED METHODS OF MANUFACTURING
- Patent Title (中): 具有通孔基板互连的微电子器件及相关制造方法
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Application No.: US14563953Application Date: 2014-12-08
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Publication No.: US20150093892A1Publication Date: 2015-04-02
- Inventor: Kyle K. Kirby , Kunal R. Parekh , Sarah A. Niroumand
- Applicant: Micron Technology, Inc.
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L21/311 ; H01L21/306

Abstract:
Microelectronic devices with through-substrate interconnects and associated methods of manufacturing are disclosed herein. In one embodiment, a semiconductor device includes a semiconductor substrate carrying first and second metallization layers. The second metallization layer is spaced apart from the semiconductor substrate with the first metallization layer therebetween. The semiconductor device also includes a conductive interconnect extending at least partially through the semiconductor substrate. The first metallization layer is in electrical contact with the conductive interconnect via the second metallization layer.
Public/Granted literature
- US10685878B2 Microelectronic devices with through-substrate interconnects and associated methods of manufacturing Public/Granted day:2020-06-16
Information query
IPC分类: