Invention Application
- Patent Title: COATING APPARATUS
- Patent Title (中): 涂装装置
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Application No.: US14481998Application Date: 2014-09-10
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Publication No.: US20150096492A1Publication Date: 2015-04-09
- Inventor: Takayuki ISHII
- Applicant: Tokyo Electron Limited
- Priority: JP2013-208526 20131003; JP2014-108493 20140526
- Main IPC: B05B12/02
- IPC: B05B12/02 ; B05B3/18 ; B05B1/04

Abstract:
A coating apparatus includes: a slit nozzle that discharges a coating material from a discharge port in a slit shape; a moving mechanism that relatively moves the slit nozzle with respect to a substrate in a disk shape; and a control unit that controls the moving mechanism, wherein the control unit performs a first constant speed coating treatment of relatively moving the slit nozzle with respect to the substrate at a first speed, then an acceleration coating treatment of accelerating a relative moving speed of the slit nozzle with respect to the substrate to a second speed higher than the first speed, and then a second constant speed coating treatment of relatively moving the slit nozzle with respect to the substrate at the second speed.
Information query