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发明申请
US20150102437A1 MEMS SENSOR DEVICE WITH MULTI-STIMULUS SENSING AND METHOD OF FABRICATION 审中-公开
具有多刺激感测的MEMS传感器装置和制造方法

MEMS SENSOR DEVICE WITH MULTI-STIMULUS SENSING AND METHOD OF FABRICATION
摘要：
A device (20) includes sensors (30, 32, 34) that sense different physical stimuli. Fabrication (90) entails forming (92) a device structure (22) to include the sensors and coupling (150) a cap structure (24) with the device structure so that the sensors are interposed between the cap structure and a substrate layer (28) of the device structure. Fabrication (90) further entails forming ports (38, 40) in the substrate layer (28) such that one port (38) exposes a sense element (44) of the sensor (30) to an external environment (72), and another port (40) temporarily exposes the sensor (34) to the external environment. A seal structure (26) is attached to the substrate layer (28) such that one port (40) is hermetically sealed by the seal structure and an external port (46) of the seal structure is aligned with the port (38).
摘要（中）：

装置（20）包括感测不同物理刺激的传感器（30,32,34）。 制造（90）需要形成（92）装置结构（22）以包括具有装置结构的传感器和联接（150）盖结构（24），使得传感器插入在盖结构和基底层之间（28 ）的设备结构。 制造（90）还需要在基底层（28）中形成端口（38,40），使得一个端口（38）将传感器（30）的感测元件（44）暴露于外部环境（72），另一个 端口（40）临时将传感器（34）暴露于外部环境。 密封结构（26）附接到基底层（28），使得一个端口（40）被密封结构气密地密封，并且密封结构的外部端口（46）与端口（38）对齐。

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