发明申请
- 专利标题: MANUFACTURING METHOD FOR ELECTROLUMINESCENT ELEMENT
- 专利标题(中): 电致发光元件的制造方法
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申请号: US14381470申请日: 2013-02-28
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公开(公告)号: US20150132864A1公开(公告)日: 2015-05-14
- 发明人: Masahiro Suzuki , Yusuke Yamazaki
- 申请人: Masahiro Suzuki , Yusuke Yamazaki
- 申请人地址: JP Minato-ku, Tokyo
- 专利权人: SHOWA DENKO K.K.
- 当前专利权人: SHOWA DENKO K.K.
- 当前专利权人地址: JP Minato-ku, Tokyo
- 优先权: JP2012-044537 20120229
- 国际申请: PCT/JP2013/055529 WO 20130228
- 主分类号: H01L51/00
- IPC分类号: H01L51/00 ; H01L51/56
摘要:
A method for manufacturing an electroluminescent element including: a first manufacturing step of layering on a substrate, in the following order, a first electroconductive layer, a dielectric layer in which plural contact holes are formed which pass therethrough in a direction orthogonal to the substrate, a second electroconductive layer which is electrically connected to the first electroconductive layer inside the contact holes and which fills the contact holes, a light-emitting layer, and a third electroconductive layer; a temperature distribution measurement step of applying a voltage to the first electroconductive layer and the third electroconductive layer, causing the light-emitting layer to emit light, and measuring the temperature distribution of the electroluminescent element to obtain temperature unevenness information for the electroluminescent element; and a second manufacturing step of adjusting, on the basis of the temperature unevenness information, the density of the plural contact holes that pass through the dielectric layer.
公开/授权文献
- US09082980B2 Manufacturing method for electroluminescent element 公开/授权日:2015-07-14
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