发明申请
- 专利标题: PHOTO DETECTOR CONSISTING OF TUNNELING FIELD-EFFECT TRANSISTORS AND THE MANUFACTURING METHOD THEREOF
- 专利标题(中): 隧道场效应晶体管的照相检测器及其制造方法
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申请号: US14600196申请日: 2015-01-20
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公开(公告)号: US20150132883A1公开(公告)日: 2015-05-14
- 发明人: Pengfei Wang , Xi Lin , Wei Wang , Xiaoyong Liu , Wei Zhang
- 申请人: Pengfei Wang , Xi Lin , Wei Wang , Xiaoyong Liu , Wei Zhang
- 申请人地址: CN Shanghai
- 专利权人: FUDAN UNIVERSITY
- 当前专利权人: FUDAN UNIVERSITY
- 当前专利权人地址: CN Shanghai
- 优先权: CN201110094530.3 20110415
- 主分类号: H01L31/18
- IPC分类号: H01L31/18 ; H01L31/113 ; H01L31/0232
摘要:
The present invention belongs to the technical field of optical interconnection and relates to a photo detector, in particular to a photo detector consisting of tunneling field-effect transistors.
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